Founded in 1973, specializing in the production, maintenance of cryogenic pumps / cooling pumps, chillers and helium compressors. Service targets, including the semiconductor manufacturing industry, coatings industry, medical device manufacturing company, and other scientific and industrial research. 

 Products 

 1. Cryogenic pump / cold pump Cryopump 

 2. Refrigerator Cryostat 

 3. Helium Compressors Helium Compressor 

 4. Cryogenic pumps, chillers, compressors spare parts (with CTI, APD, Varian / Ebara and Leybold compatible) 



 Cryogenic pump / cold pump Cryopump 

 CRYO-PLEX? 8-type 

 Pumping speed (l / s): air 1500 l / s; water vapor 4000l / s; hydrogen 2500 l / s; argon 1200 

 Communications and Navigation (scc / min): argon 

 Weight (Kg): 20.4 

 Inspiratory capacity (): 1000 argon hydrogen 18 (5x10-6torr) 

 Conversion point (): 150 

 Cooling time (min): 90 

 Pump flange: (diameter 11in.) ISO NW200 

 Dimensions (mm): 526 high 



 CRYO-PLEX? 8LP type 

 Pumping speed (l / s): Air 1500l / s; water vapor 4000l / s; hydrogen 2200l / s; argon 1200 

 Communications and Navigation (scc / min): 700 argon 

 Weight (Kg): 19 

 Inspiratory capacity (): 1000 argon hydrogen 12 (5x10-6torr) 

 Conversion point (): 150 

 Cooling time (min): 90 

 Pump flange: (diameter 11in.) ISO NW200 

 Dimensions (mm): 574 high 179 long 



 CRYO-PLEX? 10-type 

 Pumping speed (l / s): Air 3000l / s; water vapor 9000l / s; hydrogen 5000l / s; argon 2500 

 Communications and Navigation (scc / min): Ar 1500 

 Weight (Kg): 38.6 

 Inspiratory capacity (): argon hydrogen 2000 24 (5x10-6torr) 

 Conversion point (): 300 

 Cooling time (min): 60 

 Pump flange: (diameter 11in.) ISO N